Numerical Analysis of Deposition Rates of Zirconium Thin Films by Thermal Chemical Vapor Deposition
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چکیده
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1992
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.100.266